EVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM
نویسندگان
چکیده
منابع مشابه
Sol-gel spin coating derived ZnO thin film to sense the acetic acid vapor
ZnO thin film of 80 nm thickness was deposited by the sol-gel spin coating method on SiO2/Si substrate and subsequently post-annealed at 500°C with a flow of oxygen for 60 min. Crystallographic structure of the sample was characterized by X-ray diffraction (XRD) method while a field emission scanning electron microscope (FESEM) was used to investigate the surface physical morphology ...
متن کاملSol-gel spin coating derived ZnO thin film to sense the acetic acid vapor
ZnO thin film of 80 nm thickness was deposited by the sol-gel spin coating method on SiO2/Si substrate and subsequently post-annealed at 500°C with a flow of oxygen for 60 min. Crystallographic structure of the sample was characterized by X-ray diffraction (XRD) method while a field emission scanning electron microscope (FESEM) was used to investigate the surface physical morphology ...
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Ethanol (C2H6O) sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol–gel method and dip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding Tetra ethanol-amine. The as-coated films were preheated at 150 ºC fo...
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Nanostructured ZnO thin films were prepared by sol-gel dip coating technique. Zinc acetate and ammonium hydroxide were used as precursors and ethanol was as solvent. Ammonium hydroxide (NH4OH) solution was added drop-wise under vigorous stirring to obtain the sol-gel of different pH (varying from 6.9 to 7.2). ZnO thin films were obtained by dipping the glass substrates for few seconds and then ...
متن کاملEffect of Annealing Time Process on the pH Sensitivity of Spin-coated TiO2/ ZnO Bilayer Film
This paper presents an investigation on titanium dioxide (TiO2) and zinc oxide (ZnO) bilayer film, which is used as sensing membrane for extended-gate field effect transistor (EGFET) for pH sensing application. TiO2/ZnO thin films were deposited using sol-gel spin coating method on indium tin oxide (ITO) substrates. After the deposition, the bilayer films were annealed at constant temperatures ...
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ژورنال
عنوان ژورنال: Jurnal Teknologi
سال: 2021
ISSN: 2180-3722,0127-9696
DOI: 10.11113/jurnalteknologi.v83.16313